The Delta_X project is to develop a X-ray metrology system for the semiconductor industry,
capable of measuring and monitoring the key thin films required for low power, high
efficiency devices. These devices are being developed to be used in several applications; from
solid state LED lighting, solar cells and more efficient high power electronics. All of these
require measurement of nanoscale films to improve the performance of the devices and
manufacturing efficiency. The films are becoming more complex, meaning existing metrology
is not capable of giving the required information in a reasonable timescale for the
manufacturer. The new Delta_X system will incorporate new technology on both X-ray sourc
and detector to allow the measurement of these advanced films to accelerate the product
development and improve the production process of these critical devices enabling the
acceleration of higher efficiency lighting and electronics into mainstream use, thus reducing
carbon emissions and reducing energy consumption.