History of changes to: ALEGRO: Atomic Layer Deposition and Etching for GaN Power Device Applications
Date Action Change(s) User
Nov. 27, 2023, 2:12 p.m. Added 35 {"external_links": []}
Nov. 20, 2023, 2:03 p.m. Added 35 {"external_links": []}
Nov. 13, 2023, 1:33 p.m. Added 35 {"external_links": []}
Nov. 6, 2023, 1:31 p.m. Added 35 {"external_links": []}
Aug. 14, 2023, 1:30 p.m. Added 35 {"external_links": []}
Aug. 7, 2023, 1:31 p.m. Added 35 {"external_links": []}
July 31, 2023, 1:34 p.m. Added 35 {"external_links": []}
July 24, 2023, 1:35 p.m. Added 35 {"external_links": []}
July 17, 2023, 1:34 p.m. Added 35 {"external_links": []}
July 10, 2023, 1:26 p.m. Added 35 {"external_links": []}
July 3, 2023, 1:26 p.m. Added 35 {"external_links": []}
June 26, 2023, 1:25 p.m. Added 35 {"external_links": []}
June 19, 2023, 1:27 p.m. Added 35 {"external_links": []}
June 12, 2023, 1:29 p.m. Added 35 {"external_links": []}
June 5, 2023, 1:33 p.m. Added 35 {"external_links": []}
May 29, 2023, 1:27 p.m. Added 35 {"external_links": []}
May 22, 2023, 1:29 p.m. Added 35 {"external_links": []}
May 15, 2023, 1:31 p.m. Added 35 {"external_links": []}
May 8, 2023, 1:37 p.m. Added 35 {"external_links": []}
May 1, 2023, 1:27 p.m. Added 35 {"external_links": []}
April 24, 2023, 1:34 p.m. Added 35 {"external_links": []}
April 17, 2023, 1:28 p.m. Added 35 {"external_links": []}
April 10, 2023, 1:24 p.m. Added 35 {"external_links": []}
April 3, 2023, 1:26 p.m. Added 35 {"external_links": []}
Jan. 28, 2023, 11:08 a.m. Created 43 [{"model": "core.projectfund", "pk": 27020, "fields": {"project": 4213, "organisation": 4, "amount": 266120, "start_date": "2017-08-31", "end_date": "2018-11-30", "raw_data": 42855}}]
Jan. 28, 2023, 10:52 a.m. Added 35 {"external_links": []}
April 11, 2022, 3:46 a.m. Created 43 [{"model": "core.projectfund", "pk": 19128, "fields": {"project": 4213, "organisation": 4, "amount": 266120, "start_date": "2017-08-31", "end_date": "2018-11-30", "raw_data": 19669}}]
April 11, 2022, 3:46 a.m. Created 41 [{"model": "core.projectorganisation", "pk": 72924, "fields": {"project": 4213, "organisation": 245, "role": "PARTICIPANT_ORG"}}]
April 11, 2022, 3:46 a.m. Created 41 [{"model": "core.projectorganisation", "pk": 72923, "fields": {"project": 4213, "organisation": 3010, "role": "PARTICIPANT_ORG"}}]
April 11, 2022, 3:46 a.m. Created 41 [{"model": "core.projectorganisation", "pk": 72922, "fields": {"project": 4213, "organisation": 3010, "role": "LEAD_ORG"}}]
April 11, 2022, 3:46 a.m. Created 40 [{"model": "core.projectperson", "pk": 44848, "fields": {"project": 4213, "person": 4971, "role": "PM_PER"}}]
April 11, 2022, 1:47 a.m. Updated 35 {"title": ["", "ALEGRO: Atomic Layer Deposition and Etching for GaN Power Device Applications"], "description": ["", "\nElectric cars and electric power delivery need efficient electrical switching devices. Semiconductor devices can do this, but also waste some energy when switching. This project plans to demonstrate high voltage switching devices using gallium nitride (GaN), the most significant semiconductor material after silicon, in a novel device format which can operate more efficiently and switch faster than the current device hybrids based on compound semiconductors combined with silicon. Making such devices will require almost atomic precision in etching and depositing layers. The project will further develop atomic layer etching (ALE) and atomic layer deposition (ALD) tools and processes ready for the manufacture of such devices. Oxford Instruments brings its experience as a process tool manufacturer for plasma-enhanced ALD, and its recent innovation in ALE, and will develop these tools and processes. The University of Glasgow will use its expertise in device design and manufacture to demonstrate a process flow for device manufacture.\n\n"], "extra_text": ["", "\n\n\n\n"], "status": ["", "Closed"]}
April 11, 2022, 1:47 a.m. Added 35 {"external_links": [15964]}
April 11, 2022, 1:47 a.m. Created 35 [{"model": "core.project", "pk": 4213, "fields": {"owner": null, "is_locked": false, "coped_id": "997daa26-310e-493f-8070-848e92581094", "title": "", "description": "", "extra_text": "", "status": "", "start": null, "end": null, "raw_data": 19653, "created": "2022-04-11T01:38:08.888Z", "modified": "2022-04-11T01:38:08.888Z", "external_links": []}}]