Name
National Research Council - Ottawa
CoPED ID
f91b2f26-67df-4152-8e97-60c57d4f7204
About
Projects in CoPED
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Status: Closed
Total funding: £9,898,875
From: June 30, 2013
To: Dec. 21, 2018
Organisations: 26
People: 6